Evaluation of surface plate flatness measurements article pdf available in the open mechanical engineering journal 384. It is a key service for maintaining high measurement accuracy and flatness performance leading to optimal quality and yield. The evaluation of flatness deviation is essential to control flat surfaces of workpieces and often to qualify a surface as a primary. For details of how to perform flatness measurements using this kit, refer to the flatness measurements section. Online flatness measurement of large steel plates using. Error analysis of overlay compensation methodologies and. How to measure flatness with optical flats by van keuren. Usually the average curve length is set to zero and we get a graph a flatness profile that is centred around the xaxis. Flatness measurements of ccds and mosaics of ccds european. Interferometric measuring systems for the flatness. The gauge is then placed onto the lapping plate and a measurement taken. Decision rules for proving conformance or nonconformance with specifications 10. Site flatness values are specific to individual sites on the wafer.
For flatness measurement of flanges and circular planes, slewing ring bearings and tower flanges for example. Can handle 1 to 5 circles, 3180 measurement points on each. Required equipment include cables and connectors instrument. This is achieved thru the use of allmill actuators, both mechanical and thermal, in an optimal way for creating the best possible flatness. The model 92031 flatness gauge kit is designed to help the user maintain plate flatness by periodically taking measurements of the plate shape following processing. Specification operators 9 iso 142531, geometrical product specifications gps. Iso 127812, geometrical product specifications gps. Straightness measurements using a measurement base. The laser beam is adjusted according to the vials on the laser transmitter, and the measurement value at the first measurement point is set to zero.
How to measure flatness with optical flats by van keuren introduction the easiest and best way to test the flatness of a flat lapped or polished surface is with an optical flat. Italy has installed many abb force measurement products in their four cold rolling mills plus tension leveling line hr pdf. Pdf the method of determining the flatness deviation of a surface plate, using differential measurements based on electronic levels, an autocollimator. Measure flatness and parallelism on a micrometer anvil and spindle episode 11. Download the complete documentation of applications as a pdf file, or select a specific topic from the left hand. Stressometer flatness systems increase operational reliability and productivity at stainless steel company in northern. State of art in measuring the flatness of ccd detectors at astronomical observatories. Two sets of parallel planes where the entire referenced surface must lie. Evaluate performance and identify possibilities to enhance the flatness control. Flatness fundamentals why measure flatness the evaluation of flatness deviation is essential to control flat surfaces of workpieces and often to qualify a surface as a primary reference to which the other workpiece elements are referred with orientation and position tolerances.
Up to now eso has used a very simple method to measure the. For manifested flatness, the iunit is computed as curve length difference per meter strip multiplied by 105. The size and position of each site is specified prior to measurement. Applications using wyler inclination measuring instruments. On a lot of roundness systems it is possible to measure flatness, this is done by rotation of the gauge such that stylus. It is not dependent on any other datums or features. An application of highly accurate angle measurement is presented in the second part, namely, a scanning device for the ultraprecise measurement of. Using the measurement data, the analysis software provided with the cr750 can produce flatness parameter values that can be used to verify that a given wafer is in compliance with peaktovalley height range the manufacturer has specified. The measurement values at the other measurement points will show the deviation from the horizontal plane. The stressometer flatness control system will minimize rejects, pass times and strip breaks. Corus relocated the prototype of a flatness measurement system, based upon an array of ultrasonic transducers, to the light shear line to provide more flatness data for assessing the performance of roll pass schedules. Angle interferometer flatness measurement the height profile the profile of deviations from flatness is the result of a number of individual straightness measurements made along a grid of lines fig.
Online flatness measurement of large steel plates using moire. A new generation optical flatness measurement systems. Measurement application guide vibrationeccentricity measurement file type pdf. Changing demands on flatness data traditionally, flatness measurement has been done manually using a straight reference straight edge or thin wire under tension and a wedge or feeler gauge. The method of determining the flatness deviation of a surface plate, using differential measurements based on electronic levels, an autocollimator or. Flatness measurement of a surface plate is an in arxiv. Stressometer flatness control health check is a detailed and comprehensive evaluation of a stressometer flatness control system. Iso definition related and other measurement methods seem uneasy in measuring and or complicated in data analysis. Recently, an optical technique based on diffused light was being used in the steelmaking industry for flatness measurement. Flatness is can be measured using a height gauge run across the surface of the part if only the reference feature is held parallel. Addidtionally, the lateral resolution of enlarging measuring areas decreases, which limits the applicapility of the measurement process especially when it comes to narrow rings. Online flatness measurement in the steelmaking industry. Abb abilitytm health check for stressometer flatness.
Perfect flatness is when all points of a surface lie in the same plane. Measurement of the height of the unpinned corner may tell whether a board will jam or not, but it gives no information about whether a highdensity device can be successfully attached to a local area of the board. Flatness is a form control, because it is used to control the form or shape of a feature. Pdf evaluation of surface plate flatness measurements. Measurement application guide outerinner diameter measurement file type pdf. This is still performed by some steel and metal producers, but automated measurement using optical gauges become more and more common.
Measurement application guide heightstepflatness measurement file type pdf. When reporting site flatness values the results can be displayed as either the maximum site flatness value found on all of the wafer sites, or the flatness values for each site individually. Flatness measurement with a reference plane parallel to the horizontal plane. The power meter is zeroed and calibrated before starting the measurement. Abb library is a web tool for searching for documents related to abb products and services. Larger samples are acquired by displacing the galvo scanner andor samples using linear stages. The flatness control c defines how much a surface on a real part may vary from the ideal flat plane.
Easily defined line or area scans recipes lateral resolution export raw data and images real time display automatic reporting multilanguage support mapping. Stressometer flatness systems increase operational. Laser flatness measurement automotive laser displacement sensors need speed, accuracy and the capability to provide excellent performance in any application. The surfaceinspect galvo scanner acquires surfaces in a raster fashion. The quality area for the flatness calculation is the pattern area 2x104mm. For a plane flatness, it calculates the distance between 2 planes which are parallels, and seach the orientation that allows to have the distance mini between them and contains all the measured hits. Our product brochure as pdf file, germanenglishdownload fill out our request form and send it back to us. This technique requires a very uniform, diffused light ribbon projected onto the surface of the product to be measured. Inspection by measurement of workpieces and measuring equipment. The gauge utilizes digital micrometer that is initially zeroed on a granite leveling plate. How does cmm software calculate flatnessperpendicularity. Thickness, shape and flatness measurement of semiconductor. Flatness tolerance is always less than the dimensional tolerance associated with it. By aiming for the worlds best in every aspect, the lkg5000 is built with the latest cuttingedge technology.
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